Design and Assessment of a 6-DOF Micro/Nanopositioning System
نویسندگان
چکیده
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ژورنال
عنوان ژورنال: IEEE/ASME Transactions on Mechatronics
سال: 2019
ISSN: 1083-4435,1941-014X
DOI: 10.1109/tmech.2019.2931619